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photochemical etching of silicon nitride surfaces and freestanding membranes
Published: 10/15/2024
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Inventor(s):
Meni Wanunu
,
Hirohito Yamazaki
Keywords(s):
Category(s):
Technology Classifications > 2. Physical Science > Electronics/Semiconductors
,
Not in use > -Materials
Contactless Optothermal Heating of Silicon Nitride for Instant Temperature Control of Individual Particles, Molecules, and Molecular Complexes near Surfaces
Published: 10/15/2024
|
Inventor(s):
Meni Wanunu
,
Hirohito Yamazaki
Keywords(s):
Category(s):
Not in use > -Microbiology
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