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Nano- And Microelectromechanical Resonators

Published: 1/29/2025 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian, Cristian Cassella
Keywords(s):
Category(s): Technology Classifications > 2. Physical Science > Electronics/Semiconductors, Not in use > -Nanotechnology
Aluminum Nitride Piezoelectric NEMS devices using 2-Dimensional Electrode Material

Published: 9/10/2024 | Inventor(s): Matteo Rinaldi, Yu Hui, Zhenyun Qian
Keywords(s): Materials, Mechanical, MEMS, Nanotechnology, Sensor Technology
Category(s): Not in use > -Sensors tech, Not in use > -Nanotechnology, Not in use > -Materials, Not in use > -Chemistry

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